Binzhou Chemical strengthens China's self-sufficiency in semiconductors

Binzhou Chemical Group, based in Shandong Province, has achieved a significant milestone by producing 6N-grade hydrofluoride (99.9999%), filling a local capacity gap. This product, crucial for etching and cleaning electronic chips, meets the requirements of advanced processes at 28 nm and smaller. Until now, these technologies relied heavily on imports.

By mastering four key techniques, including multiple distillation and impurity detection, Binzhou Chemical has established a 50-ton-per-year production line, authorized by the Shandong Provincial Inspection Institute. The company aims to strengthen security of supply by developing halogenated electron gases.